K-PATENTS - 半導體Sub fab化學液濃度計 PR-23-MS


特點:
■ 半導體製程Sub fab化學液濃度監控設計,感應器為teflon材質
■ 感應器高溫應用設計及防爆ATEX設計
■ Connected to the process by a flare fitting, G1/2 inch female or a 1/2 inch NPT process connection. Mounted directly in-line without filtering.
■ 可選TeflonPTFE或Teflon PFA或Kynar PVDF或AISI 316L stainless steel
■ 供儲存化學溶液監控、photoresist  development、photoresist stripping、蝕刻、蝕刻後槽體清潔、化學機械拋光(CMP)應用,濃度的控制可大幅降低成本
■ 乙太網路數位傳輸,無訊號飄移問題,具遠端控制能力

 

 

Refractive Index range, standard Full range, nD=1.3200...1.5300 (corresponds to 0...100% b.w.), sapphire H73 prism
Refractive Index range, option nD=1.2600...1.4700, sapphire H74 prism (for Hydrofluoric acid, HF)
Accuracy

R.I. ± 0.0002 (corresponds typically to ± 0.1% b.w.).

Repeatability: R.I. ± 0.0001 (corresponds typically to ± 0.05% b.w.).

Speed of response 1s undamped, damping time selectable up to 5 min
CORE-Optics

No mechanical adjustments and digital measurement with 3648 pixel CCD element,

589 wavelength sodium D-line light emitting diode (LED), built-in Pt-1000 temperature

sensor (linearization according to IEC 751)

Temperature compensation Automatic, digital compensation
Instrument verification With standard R.I. liquids and the documented procedure (ISO 9000)
SENSOR PR-23-MS  
Sensor wetted parts: Modified PTFE, prism gasket modified PTFE, prism sapphire, O-ring Kalrez, adaptor sapphire
Process line connection: Flare fitting or Nippon Pillar Super 300 type fitting; Line size diameters: 1/4 inch, 1/2 inch, 3/4 inch or 1 inch
Sensor weight: 5.5 kg (12 lbs
Process temperature: -20°C (-4°F)...160°C (320°F)
Ambient temperature:

Sensor: min. -20°C (-4°F), max. 45°C (113°F)

Indicating transmitter: min. 0°C (32°F), max. 50°C (122 °F)

Process pressure: PN 10
Sensor housing: Epoxy coated stainless steel
Sensor protection class: IP67, Nema 4
Approval for electrical safety cCSAus certified, Equipment Class I, Poll. Deg. 2 / Transmitter, Poll. Deg. 3 / Sensor, Install. Cat. II
INDICATING TRANSMITTER DTR  
Display 320x240 pixel graphical LCD with LED backlight, keypad with 8 membrane keys
Current output Two independent current outputs, 4-20 mA, max. load 1000 Ohm, galvanic isolation 1500 VDC or AC (peak), hold function during prism wash
Fieldbus and industrial Ethernet connectivity Through Fieldbus converter to Modbus/TCP, Modbus RTU and Ethernet/ IP networks
Power: AC input 100-240 VAC/50-60 Hz, optional 24 VDC, 30 VA
Alarms/Wash relays: Two built-in signal relays, max. 250 V/3 A
Indicating transmitter weight: 4.5 kg (10 lbs)
Transmitter protection class(Indoor use). Polycarbonate enclosure IP66, Type 4X (Indoor use); AISI 304 Stainless steel enclosure IP66
INTERCONNECTING CABLE IEC 61158-2 compliant two-wire cable
Interconnecting cable length Standard 10 m (33 ft), max. 200 m (660 ft)
OPTIONS Cable fittings to Indicating transmitter: European cable glands M20x1.5 or US conduit hubs