1. Semicon Process Refractometer PR-33-S

K-PATENTS - 半導體無塵室製程濃度計 PR-33-S

無塵室環境之FAB化學液濃度監控
具網路遙控，您不需進出無塵室即可操作監視

K-Patents半導體屈折度計PR-33-S即時監控化學液中的濃度於無塵室及fab製程及整合製程機台中。典型的K-Patents PR-33-S應用類型包括:

 

■      避免錯誤的化學液或錯誤的濃度進入製程機台或wet bench，以及避免昂貴的設備及晶圓毀損。

■      協助蝕刻製程的最佳化，以及增加槽體中蝕刻液的使用壽命。

■      增加晶圓產出率至最高20%以及減少蝕刻後去除聚合物清潔化學液(例如EKC-265)的消耗量。

■      幫助達成CMP slurries的緊密控制以及使拋光製程一致化。

 

可被監控的化學液種類

Acetic acid CH3COOH, Acetone CH3COCH3, Ammonia NH4OH, Ammonium fluoride NH4F, Ammonium hydroxide NH4OH, Ammonium sulphate(NH4)2SO4, Citric acid C6H8O7, Chromic acid CrO3, Dilute Hydrofluoric acid DHF, Ferric chloride FeCl2, Formic acid HCO2H, Hydrofluoric acid HF, Hydrochloric acid HCl, Hydrogen peroxide H2O2, Isopropylalcohol IPA, Magnesium chloride MgCl2, Nickel chloride NiCl2, Nitric acid HNO3, Phosphoric acid H3PO4, Potassium hydroxide KOH, Sodium chloride NaCl, Sodium hydroxide NaOH, Sulphuric acid H2SO4, Tetramethyl-ammonium hydroxide TMAH, (CH3)4NOH, etc.

 

 

　

Refractive Index range, standard Full range, nD=1.3200...1.5300 (corresponds to 0...100% b.w.), Sapphire H73 prism
Refractive Index range, option nD=1.2600...1.4700, Sapphire H74 prism (for Hydrofluoric acid HF)
Output units nD / R.I. (Refractive Index) / Conc% / g/l
Accuracy

R.I. ± 0.0002 (corresponds typically to ± 0.1% b.w.).

Repeatability ± 0.0001 (corresponds typically to ± 0.05% b.w.).
Speed of response 1s undamped, damping time selectable up to 5 min
Patented CORE-Optics No mechanical adjustments and digital measurement with 3648 pixel CCD element, 589 nm wavelength (sodium D-line) light emitting diode (LED), built-in Pt-1000 temperature sensor (linearization according to IEC 751)
Temperature compensation Automatic, digital compensation
Instrument verification NIST traceable calibration, verification with standard R.I. liquids and the documented procedure (ISO 9000)
SENSOR PR-33-S
Sensor wetted parts Modified PTFE, prism gasket modified PTFE prism Sapphire, O-ring Kalrez, adaptor Sapphire
Sensor housing Ultra-pure Kynar® PVDF
Process connection Flare fittings or Nippon Pillar Super 300 Type fittings; fitting sizes 1/4 inch, 1/2 inch, 3/4 inch or 1 inch
Process temperature -20°C (-4°F)...85°C (185°F)
Ambient temperature -20°C (-4°F)...45°C (113°F)
Sensor protection class IP67, Nema 4X
Sensor weight 1.2 kg (2.6 lbs)
Fieldbus and industrial Ethernet connectivity Through Fieldbus converter to Modbus/TCP, Modbus RTU and Ethernet/ IP networks
Power consumption max. 1W
Ethernet connection 10/100Base-T Ethernet
Remote functions Remote access with a web browser, data acquisition through UDP/IP
Patents US Patents US6067151 and US6760098B2, German Patent DE19855218
Sensor cable FEP-covered Ethernet cable between sensor and PoE switch; cable type Cat 5e Ethernet with RJ-45 connector, cable length 10 m (33 ft), PVDF sensor cable gland
OPTIONS:
  IEEE 802.3af compliant PoE switch (4+2 ports, 24Vdc/48Vdc input); Power supply unit for the PoE adapter (84-264 Vac); Ethernet to mA output unit (2 x 4-20 mA)